2006 Removed All Rights Reserved from first para because it automatically propagates. Added Certas to the list of trademarks Changed the title to Preface and edited three of the last four paragraphs to match TELAT Changed YEAR to 2006. Updated trademark statement per TELAT TEA changed wording to TEL-standard phrasing. TEA added “Copyright” to previously empty title tags. TELAT — changed three paragraphs starting with “Every operator and service person...” TEA changed year to 2005 and changed print reference to “Published”. TELAT requested to change the copyright to Tokyo Electron Limited, Etch Systems Changed Tokyo Electron America to Tokyo Electron US Holdings Made changes per TELAT and TEA management. Made changes per management. Converted from SGML to XML, and from TEA DTD v2 to the GTP DTD v1 with no change to content.  content was made. Converted from SGML to XML, and from DTD v2 to the DTD v1 with no change to content. Added export control. Information revised according to email by Tech Pubs manager on this date. New topic to comply with export regulations.